Microelectronics technology has promoted the development of sensor technology for decades. Therefore, the whole industry must establish a sense of innovation, vigorously strengthen the development of new sensors, improve the cost performance of products, accelerate the transformation of scientific research results, accelerate the industrialization of new sensors, and rapidly increase the market share of domestic sensors.

At present, China's sensor industry is small in scale and has a narrow application range. To this end, we do not need to change the concept, the development of sensors from the development of a single physical sensor into a highly integrated new sensor development. The development and application of new sensors has become the core and key of modern systems, and it will become a new economic growth point for the information industry in the 21st century. There are nearly 6,000 varieties of specifications.

China began to get involved in sensor manufacturing as early as the 1960s. In 1972, China established the first batch of piezoresistive sensor development and production units in China; in 1974, it successfully developed China's first practical piezoresistive pressure sensor; in 1978, China's first solid-state piezoresistive acceleration sensor was born; in 1982, The research of silicon micro mechanical system (MEMS) processing technology and SOI (silicon on insulator) technology was first started in China.

After entering the 1990s, absolute pressure sensors, micro pressure sensors, ventilator pressure sensors, polysilicon pressure sensors, and low-cost TO-8 package pressure sensors for silicon micromachining technology were introduced and produced.

In the past 30 years of reform and opening up, China's sensor technology and its industry have made great progress, mainly in the establishment of the State Key Laboratory of Sensing Technology, the National Key Laboratory of Micro/Nano, and the National Sensing Technology Engineering Center; MEMS , MOEMS (micro-optical electromechanical systems) and other research projects have been included in the national high-tech development focus; in the "Ninth Five-Year" national key scientific and technological research projects, sensor technology research has achieved 51 varieties of 86 specifications of new products, the initial establishment In the sensitive component and sensor industry; in 2007, the total output of the sensor industry reached 2.093 billion, and there were nearly 6,000 varieties and specifications, and it has been applied in various sectors of national economy and national defense construction.

In the late 1980s, China put sensors into the focus of national high-tech development. After the "Eighth Five-Year Plan", "Ninth Five-Year Plan" and "Tenth Five-Year Plan" research and industrialization construction, there are more than 2,000 enterprises and enterprises in the country. The unit is engaged in the development, production and application of sensors. Due to the level of economic development and the limitation of production and research and development funds, the overall technical level of China's sensor industry is still relatively backward, and the scale and application fields are relatively small. Today, active in the international market is still the enterprises of old industrial countries such as Germany, Japan, the United States, and Russia. In these countries, sensors are used in a wide range of applications, and many manufacturers have achieved scale production. Some companies have annual production capacity of tens of millions or even hundreds of millions. In contrast, the application range of Chinese sensors is narrow, and more applications still remain in basic applications such as industrial measurement and control.

Microelectronics pushes sensor development

Microelectronics technology has promoted the development of sensor technology for decades. In the next 10 to 20 years, traditional silicon technology will enter maturity (expected in 2014 to 2017). In terms of overall development, the traditional silicon technology market will continue to be saturated (ie, reach the limit of chip feature size) and decline in 2047 (ie, the 100th anniversary of transistor invention). At present, microelectronics technology will continue to follow the two basic laws of "equal scaling principle" and "Moore's Law", and expand the interdisciplinary horizontal application of silicon (such as MEMS) and more advanced in the approach of the limits of traditional silicon technology. Applications (quantum, molecular devices). The two major development directions of the above microelectronics technology are the main development directions of sensor technology in the current and future 20 years.

At present, the sensor industry presents eight development trends, namely, the industrialization development model of sensors, comprehensive, coordinated and sustainable development of sensor products, scale of production (annual production capacity) to scale economy development, production pattern to specialization, and sensor production. The development of technology to the direction of automation, the key technological transformation of enterprises should be transformed into the direction of digestion and absorption of imported technologies and independent innovation. The operation of enterprises should accelerate the development of internationalization from the domestic market to the domestic and foreign markets. It will develop into a pattern of ¡°big, medium and small simultaneous¡±, ¡°grouping, and specialized production coexistence¡±.

Therefore, the whole industry must establish a sense of innovation, vigorously strengthen the development of new sensors, improve the cost performance of products, accelerate the transformation of scientific research results, accelerate the industrialization of new sensors, rapidly increase the market share of domestic sensors, and narrow the gap with developed countries. At the same time, we must also consider taking the road of unity, attracting foreign advanced technology and technology, and strengthening our scientific and technological strength.