Complete MEMS inclinometer provides direct angle output with 0.1 linear inclination accuracy

Measuring 9.2 x 9.2 x 3.9 mm, the ADIS16209 programmable, dual-mode inclinometer sensor is 100 times smaller than functionally equivalent inclinometer solutions, according to the supplier. This MEMS device, claimed to be the industry¡¯s most accurate, provides a fully compensated direct angle output with less than 0.1¡ã linear inclination error.

Because of its unique dual-mode operation, the new sensor also supports a vertically mounted single-axis implementation over a full 360¡ã range. The tunable digital sensor data are output via an industry-standard SPI port, which provides access to inclination (0.025¡ã resolution), acceleration (0.244-mg resolution), temperature, and power supply.

The ADIS16209 also features a 12-bit auxiliary ADC input and DAC output, digital self-test function and configurable condition monitoring, including alarms. Housed in an LGA package, the sensor operates on a single 3 to 3.6-V power supply and can withstand a 3,500-G shock.