The D6F-P MEMS flow sensor incorporates the Dust Segregation System, a patented double-cyclone flow path that delivers accurate results in dusty environments by keeping particulates away from the sensing chip. The compact (17 x 22-mm footprint) device delivers an amplified, temperature-compensated output signal with high accuracy and repeatability, even at very low flow rates.

Specifications include +1.0 SLM, pressure range of 0.84 in. H2O, maximum pressure of 200 in.H2O, and an analog output signal to 2.5 Vdc, with 0 to 0.5 Vdc indicating negative flow.